颐虹机电|特种气体输送设备系统|上海特种气体输送设备系统厂家

描述

它可以自行运行（旁路功能），甚至停止电源或N2电源停止。此外，您可以进入手动模式并操作它。
-在洗涤器BM、PM、更换树脂和所有主要工具的过程中，不必停止'CS195SC '。没有停工时间。

-如果CS195SC检测到超过960torr的过压，旁路球阀自动打开，并防止由于背压而损坏晶片。而且，所有流向旁通管线的使用气体可以通过微型吸收器安全地布置。

气体洗涤器

Gas Scrubber

Description

- It is possible to operate(bypass function) by itself, even the power shut off or N2 supply is stop. Also, you can go into manual mode and operate it.
- It is not necessary to stop ‘CS195SC’ during Scrubber BM , PM , changing a resin and all process of Main Tool. There is no ‘Downtime’.
- If CS195SC detect over pressure more than 960torr, bypass ball valve is opened automatically and prevent the damage of wafers due to the back pressure. Also, all used gases which flow to the bypass line can be disposed safely through the Mini-absorber.

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